@conference{814416,
  author = {Elizabeth Kenyon and Michael Cresswell and Heather Patrick and Thomas Germer},
  title = {Modeling the Effect of Finite Size Gratings on Scatterometry Measurements},
  year = {2008},
  number = {6922},
  month = {2008-09-01 00:09:00},
  publisher = {Proceedings of the SPIE, Volume 6922, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842444},
  language = {en},
}