@article{814196,
  author = {N Materer and R Goodman and S Leone},
  title = {Ion-Enhanced Etching of Si(100) With Molecular Chlorine: Neutral and Ionic Product Yields as a Function of Ion Kinetic Energy and Molecular Chlorine Flux},
  year = {2000},
  number = {104},
  month = {2000-04-01 00:04:00},
  publisher = {Journal of Physical Chemistry B},
  language = {en},
}