@article{81366, author = {M Wagner}, title = {Degradation of Poly(Acrylates)Under SF5+ Primary Ion Bombardment Studied Using Time of Flight Secondary Ion Mass Spectrometry 2. Poly(n-Alkyl Methacrylates)}, year = {2005}, number = {37}, month = {2005-01-05}, publisher = {Surface and Interface Analysis}, language = {en}, }