@article{813486,
  author = {S Frigo and Zachary Levine and N Zaluzec},
  title = {Submicron Imaging of Buried Integrated Circuit Structures Using Scanning Confocal Electron Microscopy},
  year = {2002},
  number = {81},
  month = {2002-09-01 00:09:00},
  publisher = {Applied Physics Letters},
  language = {en},
}