@article{813266,
  author = {E Klein and A Ramirez and John Hall},
  title = {A Common-Path Heterodyne Interferometer for Surface Profiling in Microelectronic Fabrication},
  year = {2001},
  number = {72},
  month = {2001-05-01 00:05:00},
  publisher = {Review of Scientific Instruments},
  language = {en},
}