@article{81316,
  author = {John Gillen and Scott Wight and David Bright and T Herne},
  title = {Quantitative secondary ion mass spectrometry imaging of self-assembled monolayer films for electron beam dose mapping in the environmental scanning electron microscope},
  year = {1998},
  number = {20},
  month = {1998-07-01},
  publisher = {Scanning},
  language = {en},
}