@article{813081,
  author = {Sasa Bajt and H Chapman and Nhan Nguyen and J Alameda and J Robinson and M Malinowski and E Gullikson and Andrew Aquila and Charles Tarrio and Steven Grantham},
  title = {Design and Performance of Capping Layers for Extreme-Ulatraviolet Multilayer Mirrors},
  year = {2003},
  number = {42},
  month = {2003-10-01 00:10:00},
  publisher = {Applied Optics},
  language = {en},
}