@article{813036,
  author = {D McMullin and D Judge and Charles Tarrio and Robert Vest and F Hanser},
  title = {Extreme-Ultraviolet Efficiency Measurements of Freestanding Transmission Gratings},
  year = {2004},
  number = {43},
  month = {2004-07-01 00:07:00},
  publisher = {Applied Optics},
  language = {en},
}