@article{813026,
  author = {M Edamura and Eric Benck},
  title = {Transition From E to H Mode Discharge in Pulse-Modulated Inductively Coupled Plasmas},
  year = {2003},
  number = {21},
  month = {2003-03-01 00:03:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}