@article{812841, author = {Michael Cresswell and Nadine Guillaume and Richard Allen and William Guthrie and Rathindra Ghoshtagore and James OwenI II and Z. Osborne and N. Sullivan and Loren Linholm}, title = {Extraction of Sheet-Resistance from Four-Terminal Sheet Resistors in Monocrystalline Films Having Non-Planar Geometries}, year = {1999}, number = {12}, month = {1999-05-01 00:05:00}, publisher = {IEEE Transactions on Semiconductor Manufacturing}, language = {en}, }