@article{812396,
  author = {Yoon Bae and Martin Sohn and Dong-Ryoung Lee and Sang-Soo Choi},
  title = {Effect of partial coherence on dimensional measurement sensitivity for DUV scatterfield imaging microscopy},
  year = {2019},
  number = {27},
  month = {2019-10-02 00:10:00},
  publisher = {Optics Express},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=928348},
  doi = {https://doi.org/10.1364/OE.27.029938},
  language = {en},
}