@article{812306,
  author = {Ke Tang and Hyun Kim and Aruna Ramanayaka and David Simons and Joshua Pomeroy},
  title = {A compact, UHV ion source for enriching 28Si and depositing epitaxial thin films},
  year = {2019},
  number = {90},
  month = {2019-08-22 00:08:00},
  publisher = {Review of Scientific Instruments},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927699},
  doi = {https://doi.org/10.1063/1.5097937},
  language = {en},
}