@article{811476,
  author = {Shannon Hill and Charles Tarrio and Robert Berg and Thomas Lucatorto},
  title = {EUV-induced carbon growth at contaminant pressures between 10-10 mbar and 10-6 mbar: Experiment and model},
  year = {2020},
  number = {38},
  month = {2020-12-01 05:12:00},
  publisher = {Journal of Vacuum Science & Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=930508},
  doi = {https://dx.doi.org/10.1116/6.0000437},
  language = {en},
}