@article{811366,
  author = {Francesc Salvat-Pujol and John Villarrubia},
  title = {Conventional vs. model-based measurement of patterned line widths from scanning electron microscopy profiles},
  year = {2019},
  number = {206},
  month = {2019-07-31 00:07:00},
  publisher = {Ultramicroscopy},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927238},
  doi = {https://doi.org/10.1016/j.ultramic.2019.112819},
  language = {en},
}