@article{810276, author = {Veruska Malave and Edward Garboczi and Jason Killgore}, title = {Decoupling subsurface inhomogeneities: a 3D finite element approach for contact nanomechanical measurements}, year = {2019}, month = {2019-04-24 00:04:00}, publisher = {Nanotechnology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=926688}, language = {en}, }