@article{809301,
  author = {Ke Tang and Hyun Kim and Aruna Ramanayaka and David Simons and Joshua Pomeroy},
  title = {Targeted enrichment of 28Si thin films for quantum computing},
  year = {2020},
  number = {4},
  month = {2020-03-09 00:03:00},
  publisher = {Journal of Physics Communications},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929209},
  doi = {https://doi.org/10.1088/2399-6528/ab7b33},
  language = {en},
}