@article{809231, author = {Trevor Braun and Daniel Josell and Thomas Moffat and Hyo Lee and SH Kim}, title = {Superconformal Nickel Deposition in Through Silicon Vias: Experiment and Prediction}, year = {2018}, number = {7}, month = {2018-05-16 00:05:00}, publisher = {Journal of the Electrochemical Society}, doi = {https://doi.org/10.1149/2.0911807jes}, language = {en}, }