@article{807211,
  author = {Feng Yi and William Osborn and Jordan Betz and David LaVan},
  title = {Interactions of Adhesion Materials and Annealing Environment on Resistance and Stability of MEMS Platinum Heaters and Temperature Sensors},
  year = {2015},
  month = {2015-01-11 00:01:00},
  publisher = {Journal of Microelectromechanical Systems},
  language = {en},
}