@article{807156, author = {Yong Kim and Hongliang Shi and Nicholas Dagalakis and Satyandra Gupta}, title = {Design of a MEMS-based motion stage based on a lever mechanism for generating large displacements and forces}, year = {2016}, month = {2016-07-06 00:07:00}, publisher = {Journal of Micromechanics and Microengineering}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920668}, language = {en}, }