@article{806966, author = {Hongliang Shi and Hai-Jun Su and Nicholas Dagalakis}, title = {A Stiffness Model for Control and Analysis of a MEMS Hexapod Nanopositioner}, year = {2014}, number = {80}, month = {2014-07-09 00:07:00}, publisher = {Journal of Mechanism and Machine Theory}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915774}, language = {en}, }