@conference{806956,
  author = {Detleff Bergmann and Bernd Bodermann and Harald Bosse and Egbert Buhr and Gaoliang Dai and Ronald Dixson and W H?er-Grohne},
  title = {Photomask Linewidth Comparison by PTB and NIST},
  year = {2015},
  number = {9636},
  month = {2015-11-02 00:11:00},
  publisher = {SPIE Proceedings: Scanning Microscopies 2015, Monterey, CA, US},
  doi = {https://doi.org/10.1117/12.2199453},
  language = {en},
}