@conference{80671,
  author = {Kenneth Kreider and D DeWitt and J Fowler and J Proctor and William Kimes and Dean Ripple and Benjamin Tsai},
  title = {Comparing the Transient Response of a Resistive-Type Sensor With a Thin Film Thermocouple During the Post-Exposure Bake Process},
  year = {2004},
  number = {5378},
  month = {2004-04-01},
  publisher = {Data Analysis and Modeling for Process Control, Technical Conference | | Data Analysis and Modeling for Process Control | SPIE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830864},
  language = {en},
}