@article{806691,
  author = {Ginusha Perera and Gila Stein and James Liddle},
  title = {Spatial Coherence in Electron-Beam Patterning},
  year = {2010},
  number = {28},
  month = {2010-09-27 00:09:00},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906171},
  language = {en},
}