@conference{806621,
  author = {Lin You and Jungjoon Ahn and Joseph Kopanski},
  title = {DESIGN OF TEST STRUCTURE FOR 3D-STACKED INTEGRATED CIRCUITS (3D-SICS) METROLOGY},
  year = {2014},
  month = {2014-03-25 00:03:00},
  publisher = {2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, US},
  language = {en},
}