@article{80621,
  author = {Kenneth Kreider and Dean Ripple and William Kimes},
  title = {Thin-Film Resistance Thermometers on Silicon Wafers},
  year = {2009},
  month = {2009-03-03},
  publisher = {Measurement Science & Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=832220},
  language = {en},
}