@article{805661,
  author = {Shannon Hill and C Haich and F Dunning and G Walters and Jabez McClelland and Robert Celotta and H Craighead and J Han and D Tannenbaum},
  title = {Patterning of Octadecylsiloxane Self-assembled Monolayers on Si(100) using Ar(<sup>3</sup>P<sub>0</sub>,2) Atoms},
  year = {1999},
  number = {17},
  month = {1999-05-01 00:05:00},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620509},
  language = {en},
}