@conference{805421,
  author = {K Kreider and D DeWitt and Benjamin Tsai and Francis Lovas and David Allen},
  title = {Calibration Wafer for Temperature Measurement in RTP Tools},
  year = {1998},
  month = {1998-01-01 00:01:00},
  publisher = {Intl. Conference: Characterization and Metrology for ULSI Technology , Gaithersburg, MD, USA},
  language = {en},
}