@article{805096, author = {A Kunz and A Alstrin and S Casey and S Leone}, title = {Single photon ionization, laser optical probe technique for semiconductor growth}, year = {1994}, number = {2337}, month = {1994-01-01 00:01:00}, publisher = {Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing SPIE Proc}, language = {en}, }