@conference{80476,
  author = {William Kimes and Kenneth Kreider and Dean Ripple and Benjamin Tsai},
  title = {In Situ Calibration of Lightpipe Radiometers in Rapid Thermal Processing Between 300 C to 700 C},
  year = {2004},
  month = {2004-09-15},
  publisher = {12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, Portland, OR},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830903},
  language = {en},
}