@conference{804326,
  author = {D Bowen and R Deslattes},
  title = {X-Ray Metrology by Diffraction and Reflectivity},
  year = {2001},
  number = {No. 550},
  month = {2001-06-01 00:06:00},
  publisher = {Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP, Undefined},
  language = {en},
}