@article{803906,
  author = {E Jablonski and Vivek Prabhu and S Sambasivan and Eric Lin and Daniel Fischer and D Goldfarb and M Angelopoulos and H Ito},
  title = {Near-Edge X-Ray Absorption Fine Structure Measurements of Surface Segregation in 157 nm Photoresist Blends},
  year = {2003},
  number = {21},
  month = {2003-12-01 00:12:00},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852205},
  language = {en},
}