@article{803696,
  author = {J Kim and J Yeo and U Paik and Y Jung and Jinkyoo Park and Vincent Hackley},
  title = {Modification of Electrokinetic Behavior of CeO<sub>2</sub> Abrasive Particles in Chemical Mechanical Polishing for Shallow Trench Isolation},
  year = {2001},
  number = {39},
  month = {2001-12-01 00:12:00},
  publisher = {Journal of the Korean Physical Society},
  language = {en},
}