@article{803691,
  author = {H Huang and K Winchester and A Suvorova and Yiping Liu and X Hu and Brian Lawn and J Dell and L Faraone},
  title = {Effect of Deposition Conditions on Mechanical Properties of Low-Temperature PECVD Silicon Nitride Films},
  year = {2005},
  number = {A435-436},
  month = {2005-07-25 00:07:00},
  publisher = {Thin Solid Films},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850126},
  language = {en},
}