@article{803631, author = {S Yang and P Mirau and C Pai and O Nalamasu and E Reichmanis and Eric Lin and V. Lee and D Gidley and J Sun}, title = {Molecular Templating of Nanoporous Ultralow Dielectric Constant (approximate to 1.5) Organosilicates by Tailoring the Microphase Separation of Triblock Copolymers}, year = {2001}, number = {13}, month = {2001-09-01 00:09:00}, publisher = {Chemistry of Materials}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851868}, language = {en}, }