@article{803526,
  author = {M Sahiner and D Downey and S Novak and Joseph Woicik and D Arena},
  title = {The Local Structural Characterization of the Inactive Clusters in B, BF<sub>2</sub> and BF<sub>3</sub> Implanted Si Wafers Using X-Ray Techniques},
  year = {2021},
  month = {2021-10-12 15:10:22},
  publisher = {Microelectronics Journal},
  language = {en},
}