@conference{803446,
  author = {C Archie and J Lowney and Michael Postek},
  title = {Modeling and Experimental Aspects of Apparent Beam Width as an Edge Resolution Measure},
  year = {1999},
  number = {3677},
  month = {1999-06-01 00:06:00},
  publisher = {Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA, USA},
  language = {en},
}