@conference{803396,
  author = {Jason Gorman and Yong Kim and Nicholas Dagalakis},
  title = {Control of MEMS Nanopositioners With Nano-Scale Resolution},
  year = {2006},
  month = {2006-11-10 00:11:00},
  publisher = {Proceedings of the ASME International Mechanical Engineering Conference and Exhibition | 2006| ASME, Chicago, IL, USA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823602},
  language = {en},
}