@misc{803346,
  author = {J Allgair and C Archie and W Banke and H Bogardus and A Delaporte and Michael Postek and J Schlesinger and B Singh and Andras Vladar and A Yanof},
  title = {Unified Advanced CD-SEM specification for Sub-0.18um Technology (1999 Version)},
  year = {2000},
  month = {2000-01-31 00:01:00},
  publisher = {Unified Advanced CD-SEM specification for Sub-0.18um Technology (1999 Version) (SEMATECH Technical Transfer Document)},
  language = {en},
}