@article{803291,
  author = {S Gonda and Joseph Fu and John Kramar and Richard Silver and Hui Zhou},
  title = {Dependence of Morphology on Miscut Angle for Si(111) Etched in NH(4)F},
  year = {2003},
  number = {82(18)},
  month = {2003-05-01 00:05:00},
  publisher = {Applied Physics Letters},
  language = {en},
}