@conference{803201, author = {Vinod Anandarajah and Naveen Kalappa and Julien Baboud and Ya-Shian Li-Baboud and James Moyne}, title = {Precise Time Synchronization in Semiconductor Manufacturing}, year = {2007}, month = {2007-10-03 00:10:00}, publisher = {2007 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication, Vienna, AT}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32789}, language = {en}, }