@conference{803191,
  author = {Byron Shulver and Andrew Bunting and Alan Gundlach and Les Haworth and Alan Ross and Anthony Snell and J. Stevenson and Anthony Walton and Richard Allen and Michael Cresswell},
  title = {Design and Fabrication of a Copper Test Structure as a Electrical Critical Dimension Reference},
  year = {2006},
  month = {2006-04-01 00:04:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Austin, TX, USA},
  language = {en},
}