@conference{802811, author = {John Suehle and Baozhong Zhu and Yuan Chen and Joseph Berstein}, title = {Acceleration Factors and Mechanistic Study of Progressive Breakdown in Small Area Ultra-thin Gate Oxides}, year = {2004}, month = {2004-04-29 00:04:00}, publisher = {2004 IEEE International Reliability Physics Symposium Proceedings, Phoenix, AZ, USA}, language = {en}, }