@article{802791,
  author = {Byron Shulver and Andrew Bunting and Alan Gundlach and Les Haworth and Alan Ross and Stewart Smith and Anthony Snell and J. Stevenson and Anthony Walton and Richard Allen and Michael Cresswell},
  title = {Extraction of Sheet Resistance and Line Width from All-Copper ECD Test Structures Fabricated from Silicon Preforms},
  year = {2008},
  number = {21},
  month = {2008-11-03 00:11:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32758},
  language = {en},
}