@article{802406, author = {Ju Shang and Michael Moody and Jiazhen Chen and Sergiy Krylyuk and Albert Davydov and Tobin Marks and Lincoln Lauhon}, title = {In situ transport measurements reveal source of mobility enhancement of MoS2 and MoTe2 during dielectric deposition}, year = {2020}, number = {2}, month = {2020-04-21 00:04:00}, publisher = {ACS Applied Electronic Materials}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929793}, language = {en}, }