@article{802396, author = {Yanxue Hong and Aruna Ramanayaka and Ryan Stein and Joshua Pomeroy}, title = {Developing Single Layer MOS Quantum Dots for Diagnostic Qubits}, year = {2020}, number = {39}, month = {2020-12-28 00:12:00}, publisher = {Journal of Vacuum Science and Technology B}, doi = {https://doi.org/10.1116/6.0000549}, language = {en}, }