@article{801701,
  author = {Naftaly Krakover and Robert Ilic and Slava Krylov},
  title = {Displacement Sensing Based on Resonant Frequency Monitoring of Electrostatically Actuated Curved Micro Beams},
  year = {2016},
  number = {26},
  month = {2016-09-29 00:09:00},
  publisher = {Journal of Micromechanics and Microengineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920773},
  doi = {https://doi.org/10.1088/0960-1317/26/11/115006},
  language = {en},
}