@article{801456,
  author = {Michael Kriese and Jim Rodriguez and Gary Fournier and Steven Grantham and Shannon Hill and John Curry and Charles Tarrio and Yuriy Platonov},
  title = {Development and evaluation of interface-stabilized and reactive-sputtered oxide-capped multilayers for EUV lithography},
  year = {2015},
  number = {9422},
  month = {2015-03-16 00:03:00},
  publisher = {Proceedings of SPIE},
  doi = {https://doi.org/10.1117/12.2085934},
  language = {en},
}