@article{801276,
  author = {sami Znati and N Chedid and Houxun Miao and Lei Chen and Han Wen and Eric Bennett},
  title = {Electrodeposition of gold to conformally fill high-aspect-ratio nanometric silicon grating trenches: a comparison of pulsed and direct current protocols},
  year = {2015},
  number = {05},
  month = {2015-10-01 00:10:00},
  publisher = {Journal of Surface Engineered Materials and Advanced Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918284},
  doi = {https://doi.org/10.4236/jsemat.2015.54022},
  language = {en},
}