@article{801226,
  author = {L. Krayer and June Lau and Brian Kirby},
  title = {Structural and Magnetic Etch Damage in CoFeB},
  year = {2014},
  number = {115},
  month = {2014-05-07 00:05:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915872},
  language = {en},
}