@article{800986,
  author = {Jinho Choi and Byong Park and Sang Ahn and Dal-Hyun Kim and J Lyou and Ronald Dixson and Ndubuisi Orji and Joseph Fu and Theodore Vorburger},
  title = {Evaluation of Carbon Nanotube Probes in Critical Dimension Atomic Force Microscopes},
  year = {2016},
  number = {15},
  month = {2016-08-26 00:08:00},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920628},
  doi = {https://doi.org/10.1117/1.JMM.15.3.034005},
  language = {en},
}